Facilities
Lab Facilities
The Rutgers Biomedical Engineering Department (BME) building has core facilities for conducting research in genomics and proteomics, tissue engineering, biomedical imaging and optics, microfabrication, animal study, and high-performance computing. Dr. Zahn’s research lab includes a microfabrication facility with the following equipment:
- EVG620 Optical Lithography System
- Headway PWM32 Substrate Spinner
- Kurt Lesker PVD 75 Physical Vapor Deposition System
- Technics Micro RIE
- Xetch Xenon difluoride etching system
- MARCH Plasma
- Surface Profiler
Dr. Zahn’s Research Lab also includes a microscopy room with the following equipment:
- Nikon TE2000 Inverted Microscope
- Zurich Lock-in Amplifier
Usage Policy
General Policies and Access Requirements
Xenon difluoride etching system
SOPs
Technics 800C MicroRIE Operating Procedure